MIL-D-80118B, MILITARY SPECIFICATION: DEPOSITION SYSTEMS, VACUUM EVAPORATION, RESISTANCE TYPE AND ELECTRON BEAM TYPE (22 JUN 1979) [NO S/S DOCUMENT]
MIL-D-80118B, MILITARY SPECIFICATION: DEPOSITION SYSTEMS, VACUUM EVAPORATION, RESISTANCE TYPE AND ELECTRON BEAM TYPE (22 JUN 1979) [NO S/S DOCUMENT]., This specification covers vacuum deposition systems with completely self-contained vacuum systems including all components and accessories required for thin film deposition of conductive, refractory, and dielectric material by vacuum evaporation