FED-STD-209D, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (15 JUN 1988) [S/S BY ISO14644-1 AND ISO14644-2]

FED-STD-209D, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (15 JUN 1988) [S/S BY ISO14644-1 AND ISO14644-2]., This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles. It prescribes methods for verifying air cleanliness and requires that a plan be established for monitoring air cleanliness. It also provides a method for determining and describing concentrations (U descriptors) of ultrafine particles.