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FED-STD-209E, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (11 SEP 1992) [S/S BY ISO14644-1 AND ISO14644-2

FED-STD-209E, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (11 SEP 1992) [S/S BY ISO14644-1 AND ISO14644-2]., This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles.

FED-STD-209 Rev. E

    

Version:
E11-200129.37 KB FED-STD-209E_NOTICE-1
E09-19922.87 MB FED-STD-209E
D01-1991276.81 KB FED-STD-209D_NOTICE-1
D06-19882.16 MB FED-STD-209D

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