FED-STD-209E, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (11 SEP 1992) [S/S BY ISO14644-1 AND ISO14644-2
FED-STD-209E, FEDERAL STANDARD: AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (11 SEP 1992) [S/S BY ISO14644-1 AND ISO14644-2]., This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles.